Sample praparation

  • Magnetron sputtering
  • Atomic layer deposition (ALD, PEALD)
  • Vacuum evaporation

Surface Analytics, Depth profiling

  • X-Ray Photoelectron Spectroscopy (XPS)
  • Lew Energy Ion Scattering (LEIS)
  • Secondary Neutral Mass Spectrometry (SNMS)

Electron Microscope Laboratory

  • Scanning Electron Microscope (SEM)
  • Transmission Electron Microscope (TEM)


The materials science laboratory is founded and maintained by the Departments of Solid State Physics of the University of Debrecen and the Institute of Nuclear Physics of the Hungarian Academy of Sciences.